Product Name: 2 Series Robot
Product P/N: 6010003_6
Product Description
ATM-204 Install tool：
LAM_Autoload
ATM-205 Install tool：
KLA_Quantox XP
ATM-207 Install tool：
KLA_Tencor CD SEM
ABM-205 Install tool：
IPEC_CMP_776、Momentum_R3
| Model | Repair | Overhaul | Exchange |
| ATM-204 |  |
|
|
| ATM-205 | |
|
|
| ATM-207 | |
|
|
| ABM-205 | |
|
|