Product Name: 3 Series Robot
Product P/N: 6010004
Product Description
ATM-305 Install tool：
Mattson AST-2800
ATM-307 Install tool：
Mattson RTP
| Model | Repair | Overhaul | Exchange |
| ATM-305 |  |
|
|
| ATM-307 | |
|
|
ATM-305 Install tool：
Mattson AST-2800
ATM-307 Install tool：
Mattson RTP
| Model | Repair | Overhaul | Exchange |
| ATM-305 | |
|
|
| ATM-307 | |
|
|