Product Name: 1 Series Robot
Product P/N: 6010002
Product Description
ATM-105 Install tool：
KLA_OP2000、Thermawave、August CD SEM
ATM-107 Install tool：
KLA_Tencor CD SEM
ATM-107B Install tool：
ASTI_Sorter
WTM-107B Install tool：
IPEC_CMP_776、Momentum_R1&R2
| Model | Repair | Overhaul | Exchange |
| ATM-105 |  |
|
|
| ATM-107 | |
|
|
| ATM-107B | |
|
|
| WTM-107 | |
|
|