Product Name: Yaskawa XU-RSM 53 Series
Product P/N: XU-RSM 53 Series
Product Description
XU-RSM 53D0 Install tool：
Ebara CMP FREX300X Wet Robot
XU-RSM 5330 Install tool：
Ebara CMP Wet Robot
| Model | Repair | Overhaul | Exchange |
| Yaskawa XU-RSM 53D0 |  |
|
|
| Yaskawa XU-RSM 5330 | |
|