Product Name: MTR5 ArmSet
Product P/N: Brooks MTR5 ArmSet
Product Description
Install tool：Novellus、Lam
| Model | Repair | Overhaul | Exchange |
| MTR5 ArmSet_Nvls |  |
|
|
| MTR5 ArmSet_Lam | |
|
|
Install tool：Novellus、Lam
| Model | Repair | Overhaul | Exchange |
| MTR5 ArmSet_Nvls | |
|
|
| MTR5 ArmSet_Lam | |
|
|