Product Name: ATR7 ArmSet
Product P/N: ATR7 ArmSet
Product Description
Install tool：Novellus_ECP-200 mm、Sabre_300mm
| Model | Repair | Overhaul | Exchange |
| Brooks ATR7 ArmSet |  |
|
|
Install tool：Novellus_ECP-200 mm、Sabre_300mm
| Model | Repair | Overhaul | Exchange |
| Brooks ATR7 ArmSet | |
|
|