Product Name: Yaskawa XU-RCM53 Series
Product P/N: XU-RCM53 Series
Product Description
XU-RCM53E0 Install tool：Ebara CMP Wet Robot
XU-RCM53E0A Install tool：Ebara CMP Dry Robot
XU-RCM5301 Install tool：Ebara CMP Wet Robot
XU-RCM5300 Install tool：Ebara CMP Wet Robot
XU-RCM5301A Install tool：Ebara CMP Dry Robot
| Model | Repair | Overhaul | Exchange |
| Yaskawa XU-RCM53E0 |  |
|
|
| Yaskawa XU-RCM53E0A | |
|
|
| Yaskawa XU-RCM5301 | |
|
|
| Yaskawa XU-RCM5300 | |
|
|
| Yaskawa XU-RCM5301A | |
|