Product Name: Yaskawa XU-RCM 8220
Product P/N: XU-RCM 8220
Product Description
Install tool：Ebara CMP Dry Robot
| Model | Repair | Overhaul | Exchange |
| Yaskawa XU-RCM 8220 |  |
|
Install tool：Ebara CMP Dry Robot
| Model | Repair | Overhaul | Exchange |
| Yaskawa XU-RCM 8220 | |
|